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| Metrology & Inspection Hitachi S-4500 SEM
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Metrology & Inspection > Hitachi S-4500 SEM
Manufacturer:Hitachi
Condition:Used,we sell it at AS IS(Refurbished and Installation are optional)
Price:Best Offer
Amount: 3 sets
Description of S-4500 SEM Cold Field Emission SEM System:
Performance:
Secondary electron image resolution: 1.5 nm at 15kv
Magnification: 20X - 500KX
Electron Optics:
Electron gun: Cold field emmission source
Lens type: electromagnetic
Objective aperture: 4 position externally selectable
Stigmator: Octopole electromagnetic
Scanning coil: 2-stage electromagnetic
Sample Chamber
Size: Type I
Airlock: prepumped, max sample size:50 mm diameter
Stage motion: 5 axis manual
Draw-out door: Max sample size:150 mm dia.
Size: Type II
Airlock: prepumped, max sample size:100 mm or 150 mm diameter
Stage motion: 5 axis manual
Display system:
Image display: Dual 12" monitors
Scanning mode: Normal, reduced area , line scan, photo scan, spot position, split screen
Scanning speed: TV, 0.3, 2, 9, 25, 35, 100, 160 320 s/frame
Signal processing:Real-time processing, auto-brightness and contrast control, dynamic stigmator, sutofocus, a
Frame averaging, frame integration, contrast conversion,
Vacuum system:
Full automatic operation with pneumatic valve control
Ultimate vacuum: 10 (-7) Pa in electron gun chamber, 10(-4) Pa in specimen chamber
Ion pump: 60 L/s X1, 20 L/s X2
Speciment chamber: DP (570 L/s);Turbo Optional
Foreline: Rotary pump X2
Accessories (Optional)
Optional New EDX system: Energy Dispersive X- Ray Spectrometer QUANTAX 200
Digital Image capturing: Orion-6 software, Optional
Chilled water circulator: 10 - 20 deg C, 1.0 -1.5 L/m for DP only
Installation
AC: Single phase AC 220 or 240 volt, 50/60 Hz
Grounding: Independent grounding 100 Ohms or less
NOTE:
(1) Tool configuration shown is accurate to the knowledge of Global Nanotech Equipment. Actual configuration may vary. Buyer is advised to conduct it''s own inspections.
(2) The above description and photos are only for reference. |
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