Lam Research AutoEtch 590/490/690 Oxide Etcher Manufacturer:Lam Research Condition:Refurbished to OEM SPEC(Installation and warranty are optional) Price:Contact Us Now Location:California,USA Amount: 4 sets Description for reference only(One of the unit). Wafer Size Capacity:4 to 6 inch The system includes the following. 1. Send Indexer 2. Receive ...">

    
    

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      Home > Electronic, IT & Office Equipment > Electronic Manufacturing Machinery > Dry Asher Etcher RIE ICP Equipment Lam Research AutoEtch 5
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      Dry Asher Etcher RIE ICP Equipment Lam Research AutoEtch 5
      Dry Asher Etcher RIE ICP Equipment > Lam Research AutoEtch 590/490/690 Oxide Etcher

      Manufacturer:Lam Research
      Condition:Refurbished to OEM SPEC(Installation and warranty are optional)
      Price:Contact Us Now
      Location:California,USA
      Amount: 4 sets
      Description for reference only(One of the unit).
      Wafer Size Capacity:4 to 6 inch
      The system includes the following.
      1. Send Indexer
      2. Receive Indexer
      3. Entrance Lifter
      4. Exit Lifter
      5. 4 Pin Lifter
      6. Gap Assembly
      7. Lower Match Assembly
      8. Upper Electrode Assembly
      9. Lower Electrode Assembly
      10. 5 MFC Gas Box
      11. Main Power Supply
      12. Main Chamber Generator
      13. 2 Recipe Modules, 2 Master Modules
      14. Front & Rear EMO Switches
      15. Panels & Plexi Glass Covers (Standalone System)
      16. Main Chamber, Hex Plate, Orifice Ring, Pump Ring
      17. 2 Channel Endpoint Detector
      Please also refer to Lam Research 4520 Rainbow Oxide Etcher; Lam Research 4420 Rainbow Nitride Poly Etcher;Lam Research AutoEtch 490 Nitride Poly Etcher.

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